Cathodic arc deposition

Cathodic arc evaporation is a specific PVD technique relying on evaporation of the cathode material under high-current low-voltage conditions. During cathodic arc evaporation the cathode surface material is rapidly transformed from a solid to plasma state by a combination of intense ion bombardment and ohmic heating. The condensation of the high-energy flux of gas and cathode ions on a sample surface enables formation of coatings with very high density and possibly metastable structures.

Cathodic arc deposition is used for growing single or multilayer structures of different materials, forming a hard film to protect the surface of the base material.