Scanning electron microscope and focused ion beam

Site-specific sample preparation for transmission electron microscopy (TEM), and atom probe tomography (APT) requires specific preparation methods. The Dual Beam Focused Ion Beam Versa 3D device by FEI combines a focused ion beam column (FIB) and a scanning electron microscope column (SEM). This duality offers the possibility of cross-section imaging during the ion beam does material milling/etching and/or deposition. In combination with Energy Dispersive Spectroscopy (EDS) enables elemental mapping, and in combination with Electron Backscatter Diffraction (EBSD) offers the possibility of crystallographic analysis.